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2009, vol. 58, iss. 2, pp. 7-12
Surface acoustic wave chemical vapor sensors
aInstitute Goša, Belgrade
bUniversity of Belgrade, Faculty of Electrical Engineering
Keywords: SAW; sensor; polymer; PECH; CH2Cl2
Complete analysis of transversal surface acoustic wave (SAW) chemical vapor sensors is presented. Sensor is modeled as a two port device with three distinct parts: input transducer, the delay line covered by vapor sensing material, thin polymer film, and output transducer. Each part is represented by its equivalent circuit. The change of the output voltage, or frequency, as a function of the vapor concentration is calculated. The influence of real SAW device properties, such as propagation losses, which in known analysis methods are neglected, is also analyzed. Closed-form expressions for vapor concentration estimation are obtained. Analysis enables better insight in sensor functioning and therefore the optimal vapor sensor design. Simulation results and experimental data for a couple of quartz SAW sensors of gases similar to warfare chemical agents are shown and compared.
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article language: Serbian
document type: Original Scientific Paper
published in SCIndeks: 02/06/2009

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