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2009, vol. 58, br. 2, str. 7-12
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Hemijski gasni senzori sa površinskim akustičkim talasom
Surface acoustic wave chemical vapor sensors
aInstitut Goša, Beograd
bUniverzitet u Beogradu, Elektrotehnički fakultet
Sažetak
Prikazana je kompletna analiza transverzalnih hemijskih gasnih senzora sa površinskim akustičkim talasom (PAT). Senzor se modeluje kao četvoropol sastavljen od tri dela: ulaznog pretvarača, linije za kašnjenje, koja je prekrivena materijalom, koji je osetljiv na gasove - tankim slojem polimera i izlaznog pretvarača. Svaki deo je predstavljen svojim ekvivalentnim kolom. Izračunava se promena izlaznog napona ili učestalosti u funkciji koncentracije gasa. Analizira se i uticaj osobina realnog PAT senzora, kao što je slabljenje usled prostiranja, koje se u postojećim poznatim metodama analize zanemaruje. Dobijeni su eksplicitni izrazi za estimaciju koncentracije gasa. Analiza omogućava bolji uvid u rad senzora, a stoga i projektovanje optimalnog gasnog senzora. Prikazani su rezulti simulacije za kvarcni senzor za detekciju gasova koji simuliraju bojne otrove i upoređeni su sa eksperimentalnim.
Abstract
Complete analysis of transversal surface acoustic wave (SAW) chemical vapor sensors is presented. Sensor is modeled as a two port device with three distinct parts: input transducer, the delay line covered by vapor sensing material, thin polymer film, and output transducer. Each part is represented by its equivalent circuit. The change of the output voltage, or frequency, as a function of the vapor concentration is calculated. The influence of real SAW device properties, such as propagation losses, which in known analysis methods are neglected, is also analyzed. Closed-form expressions for vapor concentration estimation are obtained. Analysis enables better insight in sensor functioning and therefore the optimal vapor sensor design. Simulation results and experimental data for a couple of quartz SAW sensors of gases similar to warfare chemical agents are shown and compared.
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